薄膜厚度测量仪
Thin Film thickness measuring instrument

仪器型号：ST4000-DLX
生产厂家：南京科美

技术参数：

u测量范围           100Å~ 35㎛

u活动范围          200mm x 200mm(8“), 300mm x 300mm(12”)

u光斑尺寸           40㎛/20㎛, 4㎛

u测量速度          1~2 sec./site

u应用领域         All Capability of ST2000 & More Precision Measurement
                            Intended for Wafer Measurement & OLED

u选项                  Programmable Auto Z Stage

u焦点                   Coaxial Coarse and Fine Focus Controls

u附带照明          12v 100W Halogen Lamp

u测量样本大小   ≤ 8, 12

仪器用途：

薄膜测厚仪专业适用于量程范围内的塑料薄膜、薄片、隔膜、纸张、箔片、硅片等各种材料的厚度精确测量。